Guangzhou Precise Heater Co., Ltd.
Our Precise Heater Way Values For 30 years, PreciseHeater’s commitment to innovation has created a steady stream of new products, a devoted and capable workforce and constant growth. We strive to
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PTFE/PFA Inline Chemical Heater for Wet processing equipment / Solvent Heaters for inline chemical heating
Process fluid heating!
Now heat semiconductor process fluids up to 210°C!
BEST IN CLASS CHEMICAL HEATER
The PTFE Inline Chemical Heater offers unmatched performance and reliability with the ability to heat a variety of chemicals up to 210°C. This heater is suitable for either single pass or recirculating applications. Delivers best- in-class performance over a wide range of flow and temperature requirements. The TIH is the most durable and long-lasting inline chemical heater available!
FEATURES
Designed for Performance and Safety
High-temperature configuration available to heat chemicals up to 210°C
Multiple plumbing layouts available to better facilitate installation into a variety of tool configurations
Grounded electric heating elements
Redundant temperature sensors for safe operation Optional O-ring free construction minimizes contamination
Durable Constuction
Patented purge design removes chemical permeation to extend service life
All fluoropolymer-wetted surfaces withstand virtually any wet chemistries
Heavy-wall PTFE chamber and heater sheath for high temperature/pressure applications
APPLICATIONS
Semiconductor wafer cleaning
Solar/Photovoltaio Wafer Cleaning
Inline chemical heating
Safety Features
Liquid level sensor
Ground wire options
Over-temperature thermocouple
Process thermocouple
TIH Series Applications Include:
Faster heatup: Single heater chamber sizes up to 18kW.
Rapid installation: Customized plumbing connections
Long heater life for reduced cost of ownership (COO):
Patented heater gas purge system continuously removes any chemical permeation and ensures long element life.
Long heater life and clean operating: Patented heater gas purge system continuously removes chemical permeation and ensures exceptionally long element life. This system also protects against any potential ionic contamination of the chemistry.
Rugged construction: Thick walled chamber provides long service life in the harshest high temperature applications.
Exceptionally clean performance: Thick fluoropolymersheath minimizes permeation. Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.
Outstanding chemical compatibility: All fluoropolymerwetted parts compatible with virtually any chemistry.
Excellent temperature stability: Low watt density design enables accurate control of process temperature.
TIH Series Applications Include:
SC1: ammonium hydroxide (NH4OH), and hydrogen peroxide (H2O2 )
SC2: hydrochlorice acid (HCl) and hydrogen peroxide Buffered oxide etch (BOE) process: hydrofluoric acid (HF) and ammonim fluoride (NH4F)
Nitride etch/strip: phosphoric acid (H3PO4)Various acids such as:
Hydrochloric (HCl)
Hydrofluoric (HF)
Acetic (C2H4O2)
Nitric (HNO3)
Sulfuric (H2SO4)
Sulfuric acid and hydrogen peroxide
Sulfuric acid and ozone (O3)
Hydrofluoric acid and glycol (C2H6O2)
Potassium hydroxide (KOH)
Sodium hydroxide (NaOH)
Electroless nickel
Electroless copper
Electroless gold
Deionized water
Some solvents (consult factory)