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c Chemical Heaters/Ultrapure In-Line PVDF Heaters For Wet Process Equipment
Your heating system is an electric heating system designed to be used in an ultrapure environment. It is a high tech piece of equipment incorporating many design innovations and precautionary measures to insure safe and reliable operation under normal conditions. This heating system incorporates features that enable it to be used with aggressivefluids, such as de-ionized water or acids,and maintain the purity of those processfluids. The safety systems incorporateover-temperature protection, low liquid level protection, over-current protection, electrical component over-temperature protection, and a user-controlled emergency disconnect switch.
These safeties combined with proven ultra-pure technology provide a unit thateffectively reaches and maintains process temperature. The construction of the fluidhandling components of this unit usechemically resistant fluoroplastics.
Applications
Semiconductor Wet Processes
Sterilization/Cleaning
Solar/Photovoltaic Wafer Cleaning
Introduction
Your PreciseHeater® In-Line fluid heating system is a point of use heater that will accurately heat and maintain the temperature of your process fluid through the use of patented PreciseHeate® heating coil and Power-To-Flow Control® heating technologies. To obtain the best results from your unit, it is recommended that the user operating this system and the installer of this system completely read this manual and the accompanying component literature to become familiar with all the functions and features of the system.
Model | Wetted Surfaces | GenericDimensionsLx W x H (inches) | |
Housing | Heating ElementJacket | ||
Heaters for Deionized Water, Acids, & Less Aggressive Chemicals | |||
LH1 | PVDF | PFA | 5.80 x 5.80 x VH* |
LH7 | PVDF | PFA | 6.30 x 6.30 x VH* |
Heaters for Aggressive Acids & Chemicals | |||
HC | PFA | PFA | 8.50 x 6.25 x VH* |
LHT | PFA | PFA | 8.50 x 6.25 x VH* |
Legacy Models | |||
LHK | PFA | PFA | 4.31 x 4.31 x VH* |
LHM | PFA | PFA | 6.30 x 6.75 x 20.50 |
LHN | PFA | PFA | 6.30 x 6.75 x 30.19 |
LHX | PTFM | PFA | 11.00 x 6.75 x 20.5 |
LHY | PTFM | PFA | 12.82 x 6.75 x 28.5 |