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PVDF & PFA Ultra-Pure Inline Fluid Heaters for Ultra Pure Heating Solutions
Patented Technology for Increased Efficiency and ReliabilityCustomized for Your Specific Application
PreciseHeater Corporation’s series of Ultra-Pure In-Line Fluid Heaters are designed for use in industrial fluid heating applications such as those found in the semiconductor, solar, MEMS manufacturing and other industries which require the most exacting standards of purity. Constructed of the highest quality fluoropolymer materials, these heaters are custom designed and built for use with deionized water, acids, and other diverse process chemistries.
Benefits
Ultra-Pure Design
• All-Fluoropolymer Wetted Surfaces Available
• EffectiveSolutionforDIWaterandAggressiveChemicalswith Temperatures up to 180°C
Fast Response
• Low Watt Density Design; ≤ 4 watts/in.2
• Superior Temperature Response to Process Demands with Patented Heating Element
Field Tested Reliability
• Low Watt Density Extends the Life of the Heater by Spreading Out the Wattage
• MTBF of >10 years, Proves Field Reliability
PreciseHeater® Heating Element
Compact Design
• Heating Element Technology Maximizes Power in the Smallest Possible Design
• Smaller Footprint Results in Less Space and Easy Integration into Current Systems
• Heaters are Typically 10" to 30" Tall and Range from 2" to 6" Diameter
Applications
Semiconductor Wet Processes
Sterilization/Cleaning
Solar/Photovoltaic Wafer Cleaning
• Standard Approach:
Understand Customers’ Application Needs, and Customize a
Heating Solution for Their Specific Requirements
Reduced Cost of Operations
• PFA Extruded Over Heating Element Eliminates the Need for
Nitrogen Purge; Thus Reducing Operation Cost
Model | LH1 | LH7 |
Wetted Material | PVDF/PFA | PVDF/PFA |
Housing Material | Pipe | Pipe |
Max Temp | 95°C | 95°C |
Pressure | 60 psi at 95°C | 60 psi at 95°C |
Power* | 1-15 kW | 1-18 kW |
Accuracy | ± 0.1o C | ± 0.1o C |
Voltages** | 200-480 VAC, 1 and 3-phase | 200-600 VAC, 1 and 3-phase |
Flow | 0.5-32 gpm (1.9-122 L/min) | 0.5-32 gpm (1.9-122 L/min) |
Benefits | Variable height | Higher flow, kW |